Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Michael Feltsman, Allen Lau, Marc Schweitzer | 2004-12-07 |
| 6776848 | Motorized chamber lid | Alex Shenderovich, Marc Schweitzer, Ilya Lavitsky, Alvin Lau, Michael Feltsman | 2004-08-17 |
| 6730174 | Unitary removable shield assembly | Alan Liu, Ilya Lavitsky | 2004-05-04 |
| 6688838 | Cleanroom lift having an articulated arm | Ilya Lavitsky | 2004-02-10 |