Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Allen Lau, Michael Rosenstein, Marc Schweitzer | 2004-12-07 |
| 6776848 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Marc Schweitzer, Ilya Lavitsky, Alvin Lau | 2004-08-17 |