Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Michael Feltsman, Michael Rosenstein, Marc Schweitzer | 2004-12-07 |
| 6726805 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky | 2004-04-27 |