Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827825 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Michael Feltsman, Allen Lau, Michael Rosenstein | 2004-12-07 |
| 6812471 | Method of surface texturizing | Alan Popiolkowski, Shannon Hart, Alan Liu, Jennifer Watia, Brian T. West +1 more | 2004-11-02 |
| 6776848 | Motorized chamber lid | Michael Rosenstein, Alex Shenderovich, Ilya Lavitsky, Alvin Lau, Michael Feltsman | 2004-08-17 |