Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806479 | Apparatus and method for reducing implant angle variations across a large wafer for a batch disk | Zhimin Wan, Jiong Chen | 2004-10-19 |
| 6777687 | Substrate positioning system | John W. Vanderpot, Donald W. Berrian | 2004-08-17 |
| 6765219 | Hybrid scanning system and methods for ion implantation | Donald W. Berrian, John W. Vanderpot | 2004-07-20 |