Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806479 | Apparatus and method for reducing implant angle variations across a large wafer for a batch disk | Zhimin Wan, John D. Pollock | 2004-10-19 |
| 6710358 | Apparatus and method for reducing energy contamination of low energy ion beams | Peiching Ling | 2004-03-23 |