Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806479 | Apparatus and method for reducing implant angle variations across a large wafer for a batch disk | Jiong Chen, John D. Pollock | 2004-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806479 | Apparatus and method for reducing implant angle variations across a large wafer for a batch disk | Jiong Chen, John D. Pollock | 2004-10-19 |