Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833552 | System and method for implanting a wafer with an ion beam | — | 2004-12-21 |
| 6777687 | Substrate positioning system | John W. Vanderpot, John D. Pollock | 2004-08-17 |
| 6765219 | Hybrid scanning system and methods for ion implantation | John D. Pollock, John W. Vanderpot | 2004-07-20 |
| 6677599 | System and method for uniformly implanting a wafer with an ion beam | — | 2004-01-13 |