Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638326 | Compositions for chemical mechanical planarization of tantalum and tantalum nitride | Robert J. Small, Maria Peterson, Tuan Truong, Melvin Keith Carter | 2003-10-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638326 | Compositions for chemical mechanical planarization of tantalum and tantalum nitride | Robert J. Small, Maria Peterson, Tuan Truong, Melvin Keith Carter | 2003-10-28 |