Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638326 | Compositions for chemical mechanical planarization of tantalum and tantalum nitride | Robert J. Small, Maria Peterson, Tuan Truong, Lily Yao | 2003-10-28 |
| 6563006 | Catalytic oxidative conversion of hydrocarbons to aldehydes | — | 2003-05-13 |