Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638326 | Compositions for chemical mechanical planarization of tantalum and tantalum nitride | Robert J. Small, Tuan Truong, Melvin Keith Carter, Lily Yao | 2003-10-28 |
| 6635186 | Chemical mechanical polishing composition and process | Robert J. Small, Laurence McGhee, David J. Maloney | 2003-10-21 |