Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645930 | Clean room wipes for neutralizing caustic chemicals | Danny Wallis | 2003-11-11 |
| 6638326 | Compositions for chemical mechanical planarization of tantalum and tantalum nitride | Maria Peterson, Tuan Truong, Melvin Keith Carter, Lily Yao | 2003-10-28 |
| 6635186 | Chemical mechanical polishing composition and process | Laurence McGhee, David J. Maloney, Maria Peterson | 2003-10-21 |
| 6546939 | Post clean treatment | — | 2003-04-15 |