Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657304 | Conformal barrier liner in an integrated circuit interconnect | Christy Mei-Chu Woo, Minh Van Ngo, Steven C. Avanzino | 2003-12-02 |
| 6617176 | METHOD OF DETERMINING BARRIER LAYER EFFECTIVENESS FOR PREVENTING METALLIZATION DIFFUSION BY FORMING A TEST SPECIMEN DEVICE AND USING A METAL PENETRATION MEASUREMENT TECHNIQUE FOR FABRICATING A PRODUCTION SEMICONDUCTOR DEVICE AND A TEST SPECIMEN DEVICE THEREBY FORMED | Pin-Chin Connie Wang, Christy Mei-Chu Woo, Paul R. Besser | 2003-09-09 |
| 6525428 | Graded low-k middle-etch stop layer for dual-inlaid patterning | Minh Van Ngo, Steven C. Avanzino, Christy Mei-Chu Woo | 2003-02-25 |