Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638391 | Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same | Chia-Lin Hsu, Shih-Hsun Hsu, Hsueh-Chung Chen | 2003-10-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638391 | Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same | Chia-Lin Hsu, Shih-Hsun Hsu, Hsueh-Chung Chen | 2003-10-28 |