Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660627 | Method for planarization of wafers with high selectivities | Shao-Chung Hu, Hsueh-Chung Chen, Chia-Lin Hsu | 2003-12-09 |
| 6638391 | Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same | Chia-Lin Hsu, Art Yu, Hsueh-Chung Chen | 2003-10-28 |