Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660096 | Gas treatment apparatus | Kazuhiro Takeshita, Shinji Nagashima, Yoji Mizutani | 2003-12-09 |
| 6589339 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano | 2003-07-08 |
| 6524389 | Substrate processing apparatus | Yuta Yoshimura, Takeshi Tamura | 2003-02-25 |