Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665952 | Method for heat processing of substrate | — | 2003-12-23 |
| 6660096 | Gas treatment apparatus | Kazuhiro Takeshita, Yoji Mizutani, Kyoshige Katayama | 2003-12-09 |
| 6605550 | Substrate processing method and substrate processing apparatus | — | 2003-08-12 |
| 6590186 | Heat treatment apparatus and method | Takashi Tanaka | 2003-07-08 |
| 6589339 | Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film | Kazuhiro Takeshita, Makoto Muramatsu, Yoji Mizutani, Kazutoshi Yano, Kyoshige Katayama | 2003-07-08 |
| 6573191 | Insulating film forming method and insulating film forming apparatus | Takayuki Komiya, Shigeyoshi Kojima | 2003-06-03 |
| 6564474 | Apparatus for heat processing of substrate | — | 2003-05-20 |