KY

Kazutoshi Yano

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #182,650 of 273,478Top 70%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6589339 Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating film Kazuhiro Takeshita, Shinji Nagashima, Makoto Muramatsu, Yoji Mizutani, Kyoshige Katayama 2003-07-08