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Yuta Yoshimura

TL Tokyo Electron Limited: 1 patents #101 of 380Top 30%
Overall (2003): #83,152 of 273,478Top 35%
1
Patents 2003

Issued Patents 2003

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6524389 Substrate processing apparatus Kyoshige Katayama, Takeshi Tamura 2003-02-25