Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540814 | Integrated ion implant scrubber system | Michael W. Hayes, Jose I. Arno, Glenn M. Tom | 2003-04-01 |
| 6537353 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Ray Dubois, Jose I. Arno, Rebecca Faller, Glenn M. Tom | 2003-03-25 |