Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620256 | Non-plasma in-situ cleaning of processing chambers using static flow methods | Luping Wang, Glenn M. Tom | 2003-09-16 |
| 6617175 | Infrared thermopile detector system for semiconductor process monitoring and control | — | 2003-09-09 |
| 6576573 | Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species | — | 2003-06-10 |
| 6540814 | Integrated ion implant scrubber system | Michael W. Hayes, Mark Holst, Glenn M. Tom | 2003-04-01 |
| 6537353 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Rebecca Faller, Glenn M. Tom | 2003-03-25 |