Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660063 | Sorbent-based gas storage and delivery system | James V. McManus, Luping Wang, W. Karl Olander | 2003-12-09 |
| 6620256 | Non-plasma in-situ cleaning of processing chambers using static flow methods | Jose I. Arno, Luping Wang | 2003-09-16 |
| 6540814 | Integrated ion implant scrubber system | Michael W. Hayes, Mark Holst, Jose I. Arno | 2003-04-01 |
| 6540819 | Gas cabinet assembly comprising sorbent-based gas storage and delivery system | James V. McManus | 2003-04-01 |
| 6537353 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Ray Dubois, Jose I. Arno, Rebecca Faller | 2003-03-25 |