Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537353 | Abatement of effluents from chemical vapor deposition processes using organometallic source reagents | Mark Holst, Jose I. Arno, Rebecca Faller, Glenn M. Tom | 2003-03-25 |