Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6634177 | Apparatus for the real-time monitoring and control of a wafer temperature | Kun-Tzu Lin, Jung-Huang Peng, Chu-Song Shih | 2003-10-21 |
| 6597964 | Thermocoupled lift pin system for etching chamber | Yin-Cheng Ma, Sawyer Ho, Wen-Shyang Tsai, Chen-Feng Lin | 2003-07-22 |