Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597964 | Thermocoupled lift pin system for etching chamber | Yu-Chih Huang, Yin-Cheng Ma, Wen-Shyang Tsai, Chen-Feng Lin | 2003-07-22 |
SH
Sawyer Ho
Overall (2003): #125,031 of 273,478Top 50%
1
Patents 2003