Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597964 | Thermocoupled lift pin system for etching chamber | Yu-Chih Huang, Yin-Cheng Ma, Sawyer Ho, Wen-Shyang Tsai | 2003-07-22 |
CL
Chen-Feng Lin
Overall (2003): #248,993 of 273,478Top 95%
1
Patents 2003