Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597964 | Thermocoupled lift pin system for etching chamber | Yu-Chih Huang, Yin-Cheng Ma, Sawyer Ho, Chen-Feng Lin | 2003-07-22 |
WT
Wen-Shyang Tsai
Overall (2003): #93,595 of 273,478Top 35%
1
Patents 2003