Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645698 | Photoresist compositions | James W. Thackeray, James F. Cameron | 2003-11-11 |
| 6602652 | Antireflective coating compositions and exposure methods under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Manuel DoCanto, Robert F. Blacksmith, Peter Trefonas, III | 2003-08-05 |