Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653049 | High conformality antireflective coating compositions | Manuel DoCanto, Timothy G. Adams | 2003-11-25 |
| 6602652 | Antireflective coating compositions and exposure methods under 200 nm | Timothy G. Adams, Roger F. Sinta, Manuel DoCanto, Robert F. Blacksmith, Peter Trefonas, III | 2003-08-05 |