Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602652 | Antireflective coating compositions and exposure methods under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Roger F. Sinta, Manuel DoCanto, Peter Trefonas, III | 2003-08-05 |