Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602652 | Antireflective coating compositions and exposure methods under 200 nm | Timothy G. Adams, Edward K. Pavelchek, Roger F. Sinta, Manuel DoCanto, Robert F. Blacksmith | 2003-08-05 |
| 6599677 | Polymer and photoresist compositions | Charles R. Szmanda, George G. Barclay, Wang Yueh | 2003-07-29 |