Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6665858 | Manufacturing method of semiconductor device | — | 2003-12-16 |
| 6656644 | Manufacturing method of photomask and photomask | Norio Hasegawa, Toshihiko Tanaka, Joji Okada, Kazutaka Mori | 2003-12-02 |
| 6622292 | Design method for logic circuit, design support system for logic circuit and readable media | Kazuhiko Eguchi, Tadaaki Tanimoto | 2003-09-16 |
| 6596656 | Manufacturing use of photomasks with an opaque pattern comprising an organic layer photoabsorptive to exposure light with wavelengths exceeding 200 NM | Toshihiko Tanaka, Norio Hasegawa, Kazutaka Mori, Tsuneo Terasawa | 2003-07-22 |