Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670201 | Manufacturing method of semiconductor device | Masaki Kouno, Masato Hamamoto, Atsushi Wakahara, Hideyuki Takahashi, Keiichi Higeta +1 more | 2003-12-30 |
| 6656644 | Manufacturing method of photomask and photomask | Norio Hasegawa, Toshihiko Tanaka, Joji Okada, Ko Miyazaki | 2003-12-02 |
| 6636075 | Semiconductor integrated circuit and its fabrication method | Michiaki Nakayama, Masato Hamamoto, Satoru Isomura | 2003-10-21 |
| 6596656 | Manufacturing use of photomasks with an opaque pattern comprising an organic layer photoabsorptive to exposure light with wavelengths exceeding 200 NM | Toshihiko Tanaka, Norio Hasegawa, Ko Miyazaki, Tsuneo Terasawa | 2003-07-22 |