Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667135 | Method of manufacturing a photomask | Toshihiko Tanaka, Norio Hasegawa | 2003-12-23 |
| 6656645 | Method of manufacturing a photomask | Toshihiko Tanaka, Norio Hasegawa | 2003-12-02 |
| 6645856 | Method for manufacturing a semiconductor device using half-tone phase-shift mask to transfer a pattern onto a substrate | Toshihiko Tanaka, Norio Hasegawa | 2003-11-11 |
| 6596656 | Manufacturing use of photomasks with an opaque pattern comprising an organic layer photoabsorptive to exposure light with wavelengths exceeding 200 NM | Toshihiko Tanaka, Norio Hasegawa, Kazutaka Mori, Ko Miyazaki | 2003-07-22 |