Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612915 | Work piece carrier head for plating and polishing | Cyprian Emeka Uzoh, Boguslaw Nagorski, Douglas W. Young | 2003-09-02 |
| 6604988 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Homayoun Talieh, Jalal Ashjaee, Douglas W. Young | 2003-08-12 |
| 6533646 | Polishing head with removable subcarrier | — | 2003-03-18 |