Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666959 | Semiconductor workpiece proximity plating methods and apparatus | Cyprian Emeka Uzoh, Bulent M. Basol, Douglas W. Young | 2003-12-23 |
| 6649523 | Method and system to provide material removal and planarization employing a reactive pad | Bulent M. Basol, Cyprian Emeka Uzoh | 2003-11-18 |
| 6630059 | Workpeice proximity plating apparatus | Cyprian Emeka Uzoh, Bulent M. Basol, Douglas W. Young | 2003-10-07 |
| 6610190 | Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate | Bulent M. Basol, Cyprian Emeka Uzoh | 2003-08-26 |
| 6604988 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Konstantin Volodarsky, Jalal Ashjaee, Douglas W. Young | 2003-08-12 |