Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666959 | Semiconductor workpiece proximity plating methods and apparatus | Cyprian Emeka Uzoh, Homayoun Talieh, Bulent M. Basol | 2003-12-23 |
| 6634935 | Single drive system for a bi-directional linear chemical mechanical polishing apparatus | Mark Henderson, Bernard Frey | 2003-10-21 |
| 6630059 | Workpeice proximity plating apparatus | Cyprian Emeka Uzoh, Homayoun Talieh, Bulent M. Basol | 2003-10-07 |
| 6612915 | Work piece carrier head for plating and polishing | Cyprian Emeka Uzoh, Boguslaw Nagorski, Konstantin Volodarsky | 2003-09-02 |
| 6604988 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Homayoun Talieh, Konstantin Volodarsky, Jalal Ashjaee | 2003-08-12 |
| 6589105 | Pad tensioning method and system in a bi-directional linear polisher | Vulf Perlov, Efrain Velazquez | 2003-07-08 |