Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670082 | System and method for correcting 3D effects in an alternating phase-shifting mask | Yong Liu | 2003-12-30 |
| 6664009 | Method and apparatus for allowing phase conflicts in phase shifting mask and chromeless phase edges | — | 2003-12-16 |
| 6573010 | Method and apparatus for reducing incidental exposure by using a phase shifter with a variable regulator | Michael E. Kling | 2003-06-03 |
| 6566019 | Using double exposure effects during phase shifting to control line end shortening | Michael E. Kling | 2003-05-20 |
| 6553560 | Alleviating line end shortening in transistor endcaps by extending phase shifters | Melody W. Ma | 2003-04-22 |
| 6523165 | Alternating phase shift mask design conflict resolution | Christophe Pierrat, Kent Richardson | 2003-02-18 |