Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622288 | Conflict sensitive compaction for resolving phase-shift conflicts in layouts for phase-shifted features | Yao-Ting Wang, Shao-Po Wu, Christophe Pierrat, Michael Sanie | 2003-09-16 |
| 6523165 | Alternating phase shift mask design conflict resolution | Hua-Yu Liu, Christophe Pierrat | 2003-02-18 |