Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622288 | Conflict sensitive compaction for resolving phase-shift conflicts in layouts for phase-shifted features | Yao-Ting Wang, Kent Richardson, Christophe Pierrat, Michael Sanie | 2003-09-16 |
| 6605481 | Facilitating an adjustable level of phase shifting during an optical lithography process for manufacturing an integrated circuit | Seonghun Cho, Yu-Yu Chou | 2003-08-12 |
| 6593038 | Method and apparatus for reducing color conflicts during trim generation for phase shifters | Seonghun Cho | 2003-07-15 |
| 6584610 | Incrementally resolved phase-shift conflicts in layouts for phase-shifted features | Yao-Ting Wang | 2003-06-24 |
| 6569583 | Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts | Seonghun Cho | 2003-05-27 |