Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605481 | Facilitating an adjustable level of phase shifting during an optical lithography process for manufacturing an integrated circuit | Shao-Po Wu, Yu-Yu Chou | 2003-08-12 |
| 6593038 | Method and apparatus for reducing color conflicts during trim generation for phase shifters | Shao-Po Wu | 2003-07-15 |
| 6569583 | Method and apparatus for using phase shifter cutbacks to resolve phase shifter conflicts | Shao-Po Wu | 2003-05-27 |