Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670082 | System and method for correcting 3D effects in an alternating phase-shifting mask | Hua-Yu Liu | 2003-12-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670082 | System and method for correcting 3D effects in an alternating phase-shifting mask | Hua-Yu Liu | 2003-12-30 |