Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573010 | Method and apparatus for reducing incidental exposure by using a phase shifter with a variable regulator | Hua-Yu Liu | 2003-06-03 |
| 6566019 | Using double exposure effects during phase shifting to control line end shortening | Hua-Yu Liu | 2003-05-20 |