Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670602 | Scanning device and scanning method | Yoshiaki Kohama, Akihiro Goto, Yukiharu Okubo | 2003-12-30 |
| 6593152 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2003-07-15 |