Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614034 | Charged-particle-beam microlithography apparatus and methods including shielding of the beam from extraneous magnetic fields | — | 2003-09-02 |
| 6608317 | Charged-particle-beam (CPB)-optical systems with improved shielding against stray magnetic fields, and CPB microlithography apparatus comprising same | — | 2003-08-19 |
| 6593152 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji, Hirosi Sobukawa +9 more | 2003-07-15 |
| 6591412 | Methods for dividing a pattern in a segmented reticle for charged-particle-beam microlithography | — | 2003-07-08 |
| 6565633 | Electron beam treatment apparatus of flue gas and boiler system with the same apparatus | — | 2003-05-20 |
| 6541785 | Electron-beam sources and electron-beam microlithography apparatus comprising same | — | 2003-04-01 |
| 6538255 | Electron gun and electron-beam optical systems and methods including detecting and adjusting transverse beam-intensity profile, and device manufacturing methods including same | — | 2003-03-25 |
| 6525324 | Charged-particle-beam projection optical system | — | 2003-02-25 |