Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593152 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Hirosi Sobukawa +9 more | 2003-07-15 |
| 6553811 | Trap apparatus | Norihiko Nomura, Kiyoshi Yanagisawa | 2003-04-29 |