Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670602 | Scanning device and scanning method | Akihiro Goto, Muneki Hamashima, Yukiharu Okubo | 2003-12-30 |
| 6518582 | Electron beam apparatus, and inspection instrument and inspection process thereof | — | 2003-02-11 |