Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632549 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Tsuneaki Ohashi, Kiyoshi Araki, Sadanori Shimura | 2003-10-14 |
| 6607836 | Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors | Jun Yoshikawa, Masaaki Masuda, Chikashi Ihara | 2003-08-19 |