Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667264 | Silicon nitride sintered material and process for production thereof | Kiyoshi Araki, Katsuhiro Inoue, Masaaki Masuda | 2003-12-23 |
| 6641941 | Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation | Hirotake Yamada | 2003-11-04 |
| 6632549 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Kiyoshi Araki, Sadanori Shimura, Yuji Katsuda | 2003-10-14 |
| 6562183 | Anti-corrosive parts for etching apparatus | Hirotake Yamada, Sadanori Shimura | 2003-05-13 |
| 6541406 | Silicon nitride sintered material and process for production thereof | Kiyoshi Araki, Katsuhiro Inoue, Masaaki Masuda | 2003-04-01 |