Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632549 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Tsuneaki Ohashi, Kiyoshi Araki, Yuji Katsuda | 2003-10-14 |
| 6562183 | Anti-corrosive parts for etching apparatus | Hirotake Yamada, Tsuneaki Ohashi | 2003-05-13 |